Perfluorinated compounds such as CF@sub 4@, C@sub 2@F@sub 6@, CHF@sub 3@, and others serve as low-toxicity carriers of fluorine for various semiconductor manufacturing processes. The low-toxicity of these chemically stable compounds make the workplace safer, but are a cause of concern when considering their long-term environmental impact. Most PFC's are strong absorbers of infrared radiation. This heat retention, combined with an extremely long atmospheric lifetime makes the environmental impact of continued emission significant and deserving of attention. This paper summarizes the current state of research on the roles of PFC's in the environment, and briefly considers various treatment methods that reduce emissions. There are several commercial systems available which have demonstrated dramatic performance in reducing PFC emissions.