AVS 46th International Symposium
    The Science of Micro-Electro-Mechanical Systems Topical Conference Thursday Sessions
       Session MM+MI-ThM

Invited Paper MM+MI-ThM3
Magnetic Micromachining Technology: From Materials to Components to Actuators

Thursday, October 28, 1999, 9:00 am, Room 620

Session: Processing and Integration Technology
Presenter: M.G. Allen, Georgia Institute of Technology
Correspondent: Click to Email
The fabrication of micromachined structures based on magnetic elements requires the development of both magnetically soft and hard materials, as well as suitable processes that allow the incorporation of these materials into microelectromechanial systems (MEMS). This presentation summarizes approaches to materials and fabrication techniques for magnetic MEMS, and illustrates their use through several examples, including: flux concentrators to improve the sensitivity of magnetotransistors; integrated inductive components for electronic packages; and fully-integrated, magnetically-actuated microrelays.