AVS 46th International Symposium
    Applied Surface Science Division Monday Sessions
       Session AS2-MoA

Paper AS2-MoA10
Guided Ion-beam Studies of Low Energy Cu@super +@ and Cu@sub 2@@super +@ Ion Interactions with Ni(100)

Monday, October 25, 1999, 5:00 pm, Room 6A

Session: Applied Surface Science for Microelectronics
Presenter: A. Lapicki, University of Utah
Authors: S.L. Anderson, University of Utah
A. Lapicki, University of Utah
K.J. Boyd, University of Utah
M. Aizawa, University of Utah
Correspondent: Click to Email
Low-energy (5-220 eV) Cu@super +@ and Cu@sub 2@@super +@ ions are deposited on Ni(100) under UHV conditions using the phase-space compressing ion beam deposition system at the University of Utah. The nature of the deposited Cu is determined by variable angle XPS and XAES. The disposition of the Cu deposits is explored as a function of ion energy and species. The Cu-Ni system exhibits stable surface and bulk alloys, and thus provides an interesting comparison to the C metal systems previously studied by ion beam methods (Ag/Ni, Cu/Mo). The influence of system thermodynamics and ion energy effects are examined via experiments and computer simulations.