AVS 45th International Symposium
    Selected Energy Epitaxy Topical Conference Thursday Sessions

Session SE-ThA
Seeded Supersonic Beam Epitaxial Growth

Thursday, November 5, 1998, 2:00 pm, Room 327
Moderator: R. Bickness-Tassius, Jet Propulsion Laboratory


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Click a paper to see the details. Presenters are shown in bold type.

2:00pm SE-ThA1 Invited Paper
Selected Energy Epitaxial Deposition of GaN and AlN on SiC(0001) Using Seeded Supersonic Free-Jets of NH@sub 3@ in Helium
V.M. Torres, Arizona State University, R.B. Doak, Fulbright Senior Scholar, Ruhr-Universitaet-Bochum, Germany, B.J. Wilkens, David J. Smith, I.S.T. Tsong, Arizona State University
2:40pm SE-ThA3 Invited Paper
Homoepitaxial Growth of GaN Using Seeded Supersonic Molecular Beams
H.H. Lamb, North Carolina State University
3:20pm SE-ThA5
The Effect of Scaling Precursor Duty Cycles on Pulsed Supersonic Molecular Beam AlN Growth Rates
V.W. Ballarotto, M.E. Kordesch, Ohio University
3:40pm SE-ThA6
In-Situ Surface Cleaning of GaN Using Hyperthermal Molecular Beams
A. Michel, E. Chen, O. Nam, D. Thomson, R.F. Davis, H.H. Lamb, North Carolina State University
4:20pm SE-ThA8 Invited Paper
Controlling Thin Film Morphology and Selectivity using Collimated Monoenergetic Molecular Beams
J.R. Engstrom, Cornell University
5:00pm SE-ThA10
Three Dimensional Modeling of Silicon Deposition Process Scale-up Employing Supersonic Jets
G. Chen, I.D. Boyd, J.R. Engstrom, Cornell University