| AVS 45th International Symposium | |
| The Science of Micro-Electro-Mechanical Systems Topical Conference | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | MM+NS+SS-TuM1 Invited Paper Making a Bridge to the Nanoworld S.R. Manalis, S.C. Minne, J.D. Adams, K.B. Crozier, H.T. Soh, T.A. Sulchek, K. Wilder, Stanford University, G.G. Yaralioglu, A. Atalar, Bilkent University, Turkey, C.F. Quate, Stanford University |
| 9:00am | MM+NS+SS-TuM3 Invited Paper Nanotribology of Vapor-Phase Lubricants and Their Potential Applications to MEMS@footnote 1@ J. Krim, North Carolina State University |
| 10:20am | MM+NS+SS-TuM7 Vacuum Deposited Fluorinated Alkyl Siloxane Films for Adhesion Control in MEMS Devices T.M. Mayer, M.P. de Boer, N.D. Shinn, P.J. Clews, T.A. Michalske, Sandia National Laboratories |
| 11:00am | MM+NS+SS-TuM9 Adhesion Hysteresis of Polysilicon Beams in Controlled Humidity Ambients M.P. de Boer, T.A. Michalske, M.R. Tabbara, Sandia National Laboratories, R. Maboudian, University of California, Berkeley, T.M. Mayer, Sandia National Laboratories |