AVS 45th International Symposium
    The Science of Micro-Electro-Mechanical Systems Topical Conference Tuesday Sessions
       Session MM+NS+SS-TuM

Invited Paper MM+NS+SS-TuM1
Making a Bridge to the Nanoworld

Tuesday, November 3, 1998, 8:20 am, Room 324/325

Session: Micro-Science and Tribology of MEMS
Presenter: S.R. Manalis, Stanford University
Authors: S.R. Manalis, Stanford University
S.C. Minne, Stanford University
J.D. Adams, Stanford University
K.B. Crozier, Stanford University
H.T. Soh, Stanford University
T.A. Sulchek, Stanford University
K. Wilder, Stanford University
G.G. Yaralioglu, Bilkent University, Turkey
A. Atalar, Bilkent University, Turkey
C.F. Quate, Stanford University
Correspondent: Click to Email
Our vision for micro-electro-mechanical-systems (MEMS) is to provide a window to the microscopic world. Scanning probe microscopes with automated cantilever arrays now image surface areas in excess of one square millimeter with atomic resolution. We will present new types of cantilevers and transducers that improve the speed, sensitivity, and simplicity of scanning probe microscopes. Samples are imaged at video rates with an integrated piezoelectric actuator that bends the cantilever over surface topography at high speeds. The deflection sensor, which consists of a micromachined light modulator, monitors cantilever bending with a sensitivity near one percent of an atomic diameter. We also present approaches for microfabricated biological sensors based on mechanical, electrical, and optical methods of transduction.