| AVS 45th International Symposium | |
| Electronic Materials and Processing Division | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | EM2-ThA1 Invited Paper In-Situ IR Spectroscopic Study of the Chemical Process of Si-Related CVD Thin Films T. Wadayama, Tohoku University, Japan |
| 2:40pm | EM2-ThA3 Integrated Real-Time Spectroscopic Ellipsometric and Reflectance Difference Measurements on a Commercial OMCVD Reactor M. Ebert, Technical University Berlin, Germany, K.A. Bell, S.D. Yoo, G.D. Powell, D.E. Aspnes, North Carolina State University |
| 3:00pm | EM2-ThA4 Real-Time Optical Control of Ga@sub 1-x@In@sub x@P Film Growth by P-Polarized Reflectance N. Dietz, K. Ito, V. Woods, North Carolina State University |
| 3:20pm | EM2-ThA5 Electron Cyclotron Resonance Induced Surface and Subsurface Defects in GaAs Exposed to a Chlorine/Ar Plasma O.J. Glembocki, R.T. Holm, W.E. Carlos, D. Leonhardt, Naval Research Laboratory, C.R. Eddy, Boston University, K.K. Ko, S.W. Pang, University of Michigan, D.S. Katzer, Naval Research Laboratory |
| 3:40pm | EM2-ThA6 Reciprocal-Space Analysis of Optical Spectra S.D. Yoo, N.V. Edwards, D.E. Aspnes, North Carolina State University |
| 4:00pm | EM2-ThA7 Observation of Adsorption and Reaction of NH@sub 3@ on Al@sub 2@O@sub 3@, AlN and AlON Under Steady-State Conditions Using IRRAS V.M. Bermudez, Naval Research Laboratory |
| 4:20pm | EM2-ThA8 Time of Flight Mass Spectroscopy of Recoiled Ions Comparative Studies of Gallium Nitride Thin Film Deposition By Various Molecular Beam Epitaxial Methods E. Kim, I.E. Berishev, A. Bensaoula, University of Houston, K.L. Waters, J.A. Schultz, Ionwerks |
| 4:40pm | EM2-ThA9 Near-Surface Variation of Gallium Nitride Cathodoluminescence with Annealing T. Levin, J. Schäfer, A.P. Young, L.J. Brillson, The Ohio State University, J.D. MacKenzie, C.R. Abernathy, University of Florida, Gainesville |
| 5:00pm | EM2-ThA10 In-situ Formation, Reactions, and Electrical Characterization of MBE Grown Metal/Semiconductor Interfaces L.C. Chen, D.A. Caldwell, University of Minnesota, T.G. Finstad, University of Oslo, Norway, C.J. Palmstrom, University of Minnesota |