AVS 45th International Symposium
    Electronic Materials and Processing Division Thursday Sessions

Session EM-ThM
Compound Semiconductor Surface Chemistry

Thursday, November 5, 1998, 8:20 am, Room 316
Moderator: R.S. Gold, University of Michigan


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Click a paper to see the details. Presenters are shown in bold type.

8:20am EM-ThM1
Air-Stable Sulfur-Based Passivation of III-V Compound Semiconductor Surfaces
C.I.H. Ashby, K.R. Zavadil, A.G. Baca, P.-C. Chang, B.E. Hammons, Sandia National Laboratories
8:40am EM-ThM2
Development of Surface Morphology During H@sub 2@ Plasma Processing of GaAs(001)
S.W. Robey, National Institute of Standards and Technology
9:00am EM-ThM3
Thermal Chemistry and Photochemistry of Organothiols Chemisorbed on GaAs(110)
N. Camillone, III, K.A. Khan, R.M. Osgood, Jr., Columbia University
9:20am EM-ThM4
The Surface Structures of In@sub x@Ga@sub 1-x@As@sub y@P@sub 1-y@ (001) Films Grown by Metalorganic Vapor-Phase Epitaxy
L. Li, B.-K. Han, M.J. Bergarney, D. Law, Q. Fu, R.F. Hicks, University of California, Los Angeles
9:40am EM-ThM5
Low Induced Damages Dry Etching of III-V Materials for HBT Applications using ICP in Chlorinated Plasma
J.J. Etrillard, J.F. Bresse, C. Daguet, M. Riet, J. Mba, CNET, France Telecom
10:00am EM-ThM6
Variable Substrate Temperature for Precise Growth of II-VI Interfaces
Y. Luo, M. Han, J.E. Moryl, R.M. Osgood, Jr., Columbia University
10:20am EM-ThM7
Effect of Surface Interactions on Band Offsets at Buried Semiconductor-Insulator Interfaces
B.R. Schroeder, S. Meng, M.A. Leskovar, M.A. Olmstead, University of Washington
10:40am EM-ThM8
Comparison of Morphology and Interfacial Composition of Pd Ultra-thin Films on 6H- and 4H-SiC at Different Annealing Temperatures
W.J. Lu, D.T. Shi, E. Bryant, A. Burger, W.E. Collins, Fisk University
11:00am EM-ThM9
Field Emission Studies of BN Overlayers on Various Substrates
N. Badi, A. Tempez, D. Starikov, A. Bensaoula, University of Houston, V.P. Ageev, S.V. Garnov, M.V. Ugarov, S.M. Klimentov, E. Loubnin, V.N. Tokarev, General Physics Institute, Russia, K.L. Waters, A. Shultz, Ionwerks
11:20am EM-ThM10
Influence of Ammonia Surface Reactions in GaN Chemical Vapor Deposition
M.E. Bartram, Sandia National Laboratories
11:40am EM-ThM11
Optimization of the Nitridation of Sapphire Substrates Using a Fractional Factorial Designed Experiment
T.J. Kropewnicki, P.A. Kohl, Georgia Institute of Technology