AVS 45th International Symposium
    Electronic Materials and Processing Division Thursday Sessions
       Session EM-ThM

Paper EM-ThM10
Influence of Ammonia Surface Reactions in GaN Chemical Vapor Deposition

Thursday, November 5, 1998, 11:20 am, Room 316

Session: Compound Semiconductor Surface Chemistry
Presenter: M.E. Bartram, Sandia National Laboratories
Correspondent: Click to Email

UHV thermal desorption mass spectroscopy measurements of N@super 15@H@sub 3@ chemisorbed on GaN(0001) have demonstrated that ammonia undergoes both reversible and irreversible decomposition on the surface. Overall, N@super 15@H@sub n@ fragments and surface hydrogen from ammonia dissociation either (I) recombined to liberate N@super 15@H@sub 3@ or (II) decomposed further to enrich the surface with nitrogen. This was accompanied by the desorption of N@super 15@@sub 3@, N@super 15@N@super 14@, N@super 14@@sub 2@, and H@sub 2@ at a temperature below that required for congruent GaN sublimation. These reactions are the "crossroads" for the other important reaction avenues on the surface. Considering case I, production of surface hydrogen from ammonia decomposition suggests that this rate may be sensitive to hydrogen coverage and hence be influenced by the H@sub 2@ carrier gas used commonly in GaN CVD. Case II suggests that in addition to supplying the nitrogen for GaN growth, ammonia decomposition can also lead to the extraction of nitrogen from the surface when the nitrogen coverages are sufficiently high. This catalytic removal of surface nitrogen in the form of N@super 15@N@super 14@ and not N@super 14@H@sub 3@ indicates further that N-H bond formation as an initial step in potential hydrogen etching reactions can be overwhelmed by the tremendous driving force of the NN bond energy (226 kcal/mol). Therefore, while the nitrogen feed to the surface in the form of ammonia is necessary to compensate for congruent GaN sublimation and also contribute to GaN growth, it can also provide a low energy reaction pathway for the removal of nitrogen from a nitrogen enriched surface. This suggests that the overall nitrogen incorporation rate must be well-matched to the Ga deposition rate to maintain the proper stoichiometry and a reproducible overall growth rate. We have also observed that ammonia lowers the temperature for the desorption of TMG from surface defects. This decrease in the TMG-surface bond energy which can also lower the TMG residence time on the surface, suggests ammonia surface reactions have the potential to inhibit TMG reactions during GaN CVD. (Sandia is operated by Sandia Corporation, a Lockheed Martin Company, for the USDOE under DE-AC04-94AL85000.)