AVS 45th International Symposium
    Thin Films Division Tuesday Sessions
       Session TF-TuA

Paper TF-TuA9
A Novel Design of a Reflecton Analyzer for Elemental and Isotopic Analysis by MSRI (Mass Spectroscopy of Recoil Ions)@footnote 1@

Tuesday, November 3, 1998, 4:40 pm, Room 310

Session: In-situ Characterization of Thin Films
Presenter: K.L. Waters, Ionwerks
Authors: K.L. Waters, Ionwerks
K. Baudin, Ionwerks
J.A. Schultz, Ionwerks
Correspondent: Click to Email
Mass Spectroscopy of Recoil Ions (MSRI) is a recently developed technique which has been reviewed@footnote 2@ and has been used in real time monitoring of nitride@footnote 3@ and oxides growths. The technique is similar to Time of Flight SIMS (TOF/SIMS) in that a pulsed keV primary ion beam is impinging at grazing incidence onto the analyzed surface. Sputtered ions are collected and analyzed by TOF. By careful design of the extraction optics using differential pumping and by placement of the analyzer in the forward scattering angle at around 60-70 degrees, it is possible to achieve mass spectra of directly recoiled binary ions which are devoid of molecular interference at pressures in excess of 1mTorr. For the optic positioned at 1inch from the focal point of the primary ion beam onto the sample, Mo isotopes have been resolved with a resolution at half maximum of 450. Operation at 2 inches from the focal point reduces the resolution to 250 and reduces the collection and transmission of recoiled ions by a factor of two. Examples will be given of the use of the MSRI technique for both exsitu and real time control of deposition process. @FootnoteText@ @footnote 1@Financial support of this work by US Air Force SBIR Contract F33615-970C-1035 @footnote 2@M. S Hammond, J.A Schultz, A. R. Krauss J.Vac.Sci. Technol. A 13(3) 1995 @footnote 3@E. Kim, I. Berishev, A. Bensaoula, S. Lee, S.S. Perry, K. Waters, J.A. Schultz Appl. Phys. Lett. 71 (21) 1997