AVS 45th International Symposium
    Thin Films Division Tuesday Sessions
       Session TF-TuA

Paper TF-TuA2
Optical Constants of Crystalline WO@sub 3@ Deposited by Magnetron Sputterting

Tuesday, November 3, 1998, 2:20 pm, Room 310

Session: In-situ Characterization of Thin Films
Presenter: M.J. DeVries, University of Nebraska, Lincoln
Authors: M.J. DeVries, University of Nebraska, Lincoln
C. Trimble, University of Nebraska, Lincoln
T.E. Tiwald, University of Nebraska, Lincoln
D.W. Thompson, University of Nebraska, Lincoln
J.A. Woollam, University of Nebraska, Lincoln
J.S. Hale, J. A. Woollam Co., Inc.
Correspondent: Click to Email
Crystalline WO@sub 3-x@ is an infrared (IR) electrochromic material with possible applications in satellite thermal control and IR switches. Optical constants of electrochromic materials change upon ion intercalation, usually with H@super +@ or Li@super +@. Of primary concern for device design are the optical constants in both the intercalated and unintercalated states. In-situ and ex-situ ellipsometric data are used to characterize both the deposition process and the optical constants of the film. Ex-situ data from a UV-Vis-NIR ellipsometer are combined with that from a mid-infrared FTIR-based ellipsometer to provide optical constants over a spectral range of 190 nm to 30 µm.