AVS 45th International Symposium
    Thin Films Division Thursday Sessions
       Session TF-ThA

Invited Paper TF-ThA1
Ex-situ Characterization of Polycrystalline Thin Films

Thursday, November 5, 1998, 2:00 pm, Room 310

Session: Ex-situ Characterization of Thin Films
Presenter: J. Rickman, Lehigh University
Authors: K. Barmak, Lehigh University
J. Rickman, Lehigh University
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The granular nature of polycrystalline thin films is an increasingly important consideration in modern high technology applications as grain and structural dimensions become comparable. This realization has prompted a renewed interest in understanding those factors which affect the evolution of grain structure in both as-deposited and reacted thin films. This presentation will address the ex-situ characterization of thin films that are of relevance to microelectronics interconnects and magnetic storage media. Experimental evidence from differential scanning calorimetry, x-ray diffraction and transmission electron microscopy studies will be reviewed and details of transformation kinetics and grain structure evolution will be discussed. Theoretical models and computer simulations of these processes will also be presented. Finally, results of algorithm development for automated grain size measurement from transmission electron micrographs will be highlighted.