AVS 45th International Symposium
    Thin Films Division Monday Sessions
       Session TF-MoP

Paper TF-MoP7
Structural Characterization of SrBi@sub 2@Ta@sub 2@O@sub 9@ Ferroelectric Thin Films Grown by PLD on Pt and RuO@sub 2@ Bottom Electrodes

Monday, November 2, 1998, 5:30 pm, Room Hall A

Session: Thin Films Poster Session
Presenter: J.M. Siqueiros, UNAM, Mexico
Authors: J.M. Siqueiros, UNAM, Mexico
M.P. Cruz, CICESE, Mexico
J. Portelles, Universidad de la Habana, Cuba
R. Machorro, UNAM, Mexico
G. Hirata, UNAM, Mexico
S. Wang, UNAM, Mexico
Correspondent: Click to Email
To study the effect of the bottom electrode on the properties of the ferroelectric layer, thin SBT (SrBi@sub 2@Ta@sub 2@O@sub 9@) films were deposited by PLD on Pt/Ti/Si, Pt/TiO@sub 2@/Si and RuO@sub 2@/Si grown by DC sputtering. Due to the previously reported experience that the Ti in the adherence promoter layer diffuses to the Pt surface, a study of the SBT/electrode interface using AES and TEM is performed. XRD, SEM, STM and ellipsometry measurements were performed on the SBT films and compared with the corresponding measurements on the ceramic used as target for the deposit, which showed a layered perovskite structure.