AVS 45th International Symposium
    Thin Films Division Monday Sessions
       Session TF-MoP

Paper TF-MoP2
Humidity Sensing Properties of Plasma Polymerized Organic Thin Films

Monday, November 2, 1998, 5:30 pm, Room Hall A

Session: Thin Films Poster Session
Presenter: G.B. Park, Yuhan College, Korea
Authors: G.B. Park, Yuhan College, Korea
J.T. Kim, Inha University, Korea
D.C. Lee, Inha University, Korea
C. Kim, Korea Electronic Technology Institute
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In order to fabricate humidity sensitive films, the mono-layer polymer thin films from various monomers were deposited on a comb-shaped electrode using a capacitive-coupled gas flow type plasma polymerization apparatus with rf power. The humidity sensing characteristics of these thin films were measured by means of changes in electrostatic capacitance within the frequency and humidity range of 60Hz - 100 kHz and 20% RH - 90% RH, respectively. The capacitances of these thin films were increased with increasing relative humidity. And the increments of the capacitance grew larger with a lower discharging power and a shorter polymerization time. The linearity and increment of the capacitance change became apparent with the lower frequency of input power to thin films during the capacitance measurements. The copolymerized thin films, vinylacetate and methylmethacrylate, were fabricated using the conditions of low discharging power and short discharging time. The capacitances of this films were remarkably changed showing the linear behaviors, and these changes were continued from 20% RH to 90% RH.