AVS 45th International Symposium
    Thin Films Division Monday Sessions
       Session TF-MoP

Paper TF-MoP14
Characterization of TiOx Film deposited on Ti-6Al-4V Alloy by Reactive Sputtering in Oxygen Atmosphere

Monday, November 2, 1998, 5:30 pm, Room Hall A

Session: Thin Films Poster Session
Presenter: T. Sonoda, National Industrial Research Institute of Nagoya, Japan
Authors: T. Sonoda, National Industrial Research Institute of Nagoya, Japan
M. Kato, National Industrial Research Institute of Nagoya, Japan
Correspondent: Click to Email
Coating of Ti-6Al-4V alloy substrates with TiOx films by reactive sputtering in oxygen atmosphere was examined, not only to improve the biocompatibility of the alloy@footnote 1@ but also to enhance the bonding of the alloy implants to living bone.@footnote 2@ The reactive sputter deposition was carried out in oxygen gas using a magnetron d.c. sputtering apparatus with a pure titanium target. Thus the TiOx films were deposited on the alloy substrates at the rate of 300Å/min by the magnetron sputtering, even under the surface condition at the target to be in the reactive mode,@footnote 3@ due to reactive products covering the surface. The characteristics of the deposited TiOx films were investigated. Under visual observation, the deposited films looked light gray and appeared to be uniform and adhesive. Under SEM, the surface of the films was found to have a net-like microstructure which looked like a net consisting of micron-ordered fine meshes. Under AES, the Ti/O ratio of each film was constant in depth direction of the film. Based on XRD, it was concluded that not only the oxides(TiO@sub 2@) such as rutil and brookite but also the suboxides such as Ti@sub 4@O@sub 7@ and Ti@sub 6@O@sub 11@ were formed in the film. Therefore, it was assumed that the obtained TiOx films improved the biocompatibility of the alloy and enhanced the bonding of the alloy to living bone. Furthermore, the hardness of the TiOx films reached over Hv=800 under the film thickness of 0.8µm, concluding that the coating with the films improved the hardness of the alloy. @FootnoteText@ @footnote 1@A.Wisby et al., Biomaterials 12(1991)470. @footnote 2@T.Kitsugi et al., J. Biomed. Mater. Res. 32(1996)149. @footnote 3@S.Schiller et al., Thin Solid Films 111(1984)259.