AVS 45th International Symposium
    Manufacturing Science and Technology Group Thursday Sessions
       Session MS-ThP

Paper MS-ThP6
Reaction Products in a-C:H Film Growth by DC Glow Discharges in the Novillo Tokamak

Thursday, November 5, 1998, 5:30 pm, Room Hall A

Session: Manufacturing Science and Technology Group Poster Session
Presenter: R. Valencia, Instituto Nacional de Investigaciones Nucleares (ININ), México
Authors: R. Valencia, Instituto Nacional de Investigaciones Nucleares (ININ), México
J. de la Rosa, Instituto Politécnico Nacional, México
E. Camps, ININ, México
R. López, ININ, México
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In this work we report the reaction products generated during the growth of a-C:H films by DC glow discharges in a toroidal chamber using a calibrated mixture of 5 % methane and 95 % hydrogen and at a total pressure of 5x10@super-2@ Torr. The products were analyzed using a differentially pumped mass spectrometer. The time evolution of the partial pressure recorded after initiation of the glow discharges indicates that the reaction products are generated by the plasma-wall interaction. During the initial phase of the experiment, a continuous increase of the peak m/e=28 and a decrease of those at m/e=18, 32, and 44 was seen to occur. We suppose that the 28peak is principally due to CO because in the case of a carbonized surface, part of the initially deposited C atoms can form CO with surface oxides and the residual water vapor. The decrease of the peaks 18, 32 and 44 are due to a molecular dissociation of H@sub 2@O, O@sub 2, CO@sub 2. The films were characterized by X-ray diffraction and scanning electron microscopy. The thickness and refractive index of the films were determined from the interference fringes of the transmission spectrum.