AVS 45th International Symposium
    Applied Surface Science Division Tuesday Sessions
       Session AS-TuM

Paper AS-TuM7
Physical Influences on Chemical Identification using TOF-SIMS

Tuesday, November 3, 1998, 10:20 am, Room 307

Session: Sample Preparation and Tricks of the Trade
Presenter: T.J. Schuerlein, Charles Evans & Associates
Authors: T.J. Schuerlein, Charles Evans & Associates
G.S. Strossman, Charles Evans & Associates
K.J. Wu, Charles Evans & Associates
T.F. Fister, Charles Evans & Associates
Correspondent: Click to Email
Time of flight secondary ion mass spectrometry (TOF-SIMS) is rapidly becoming a standard tool for failure analysis and identification of surface contamination. One requirement of a tool used for these purposes is to be able to use reference spectra to help identify unknowns, as is typically done in other techniques such as FTIR. Although TOF-SIMS has had great success in addressing such identification issues, there are some possible pitfalls that are to be avoided when acquiring reference spectra and making subsequent comparisons to analytical data. We have observed a series of physical parameters that can alter mass spectra that are not related to the chemical nature of the analyte. In some cases these effects are subtle, in others the changes observed in the mass spectrum are significant. Data will be shown which illustrates these effects for physical parameters such as contaminant thickness, sample temperature and the interaction between surface species. We will also demonstrate how the intentional introduction of a reagent can be used to increase the molecular ion yield of high molecular weight species.