AVS 45th International Symposium
    Applied Surface Science Division Tuesday Sessions
       Session AS-TuM

Paper AS-TuM1
Using a Focused Beam XPS System for Analysis of Oxides, Insulators and Beam Sensitive Materials@footnote 1@

Tuesday, November 3, 1998, 8:20 am, Room 307

Session: Sample Preparation and Tricks of the Trade
Presenter: M.H. Engelhard, Pacific Northwest National Laboratory
Authors: M.H. Engelhard, Pacific Northwest National Laboratory
L.-Q. Wang, Pacific Northwest National Laboratory
B.J. Tarasevich, Pacific Northwest National Laboratory
D.R. Baer, Pacific Northwest National Laboratory
Correspondent: Click to Email
Experience gained during use of a Physical Electronics Quantum 2000 XPS system for the analysis of some oxides, insulators and beam sensitive materials is reported. This instrument, which is part of a Department of Energy user facility, uses an internal monochromatic focused x-ray beam that can be focused, raster scanned, and changed in intensity. Some of our initial studies with this instrument involved comparison of data from the Quantum with measurements made on older systems. These comparisons included an examination of line widths, x-ray damage, and effectiveness of the neutralization methods. In addition to the normal Quantum specimen handling system, the spectrometer can interface with a special specimen handling system that allows interchange among 15 different locations in the user facility. This extra capability allows conduct of a variety of experiments (involving heating, film deposition, electrochemistry or corrosion) but introduces a variety of challenges for specimen mounting. Specific data to be reported include measurements of line-width and the ability to observe defects on the rutile (110) surface and damage observed during analysis of self assembled monolayer and polymer systems. This system now includes the newly developed ion-neutralization capability (U. S. patent 5432345). Because this neutralization system includes the use of both an electron gun and low energy Ar ions, a test was made to determine if the neutralization method introduced defects on a "defect free" rutile surface. No introduction of defects was observed for the period of our test. @FootnoteText@ @footnote 1@This research was conducted at the William R. Wiley Environmental Molecular Sciences Laboratory (EMSL) with funding provided by the U.S. Department of Energy, Office of Basic Energy Sciences. The EMSL is a new DOE scientific user facility located at the Pacific Northwest National Laboratory (PNNL) in Richland, Washington. PNNL is operated by Battelle for the Department of Energy.