AVS 45th International Symposium
    Applied Surface Science Division Thursday Sessions
       Session AS-ThP

Paper AS-ThP7
In-situ Characterization of Plasma Polymerized Films Using External Reflection Infrared Spectroscopy

Thursday, November 5, 1998, 5:30 pm, Room Hall A

Session: Aspects of Applied Surface Science Poster Session
Presenter: R.H. Turner, University of Cincinnati
Authors: F.J. Boerio, University of Cincinnati
R.H. Turner, University of Cincinnati
Correspondent: Click to Email
External reflection infrared spectroscopy was used for the in-situ characterization of plasma polymerized films of acetylene, hexamethyldisilazane (HMDSZ), and hexamethyldisiloxane (HMDSO) as a function of thickness. The films were deposited onto polished iron and aluminum substrates in an inductively coupled RF reactor interfaced to an FTIR spectrometer. In-situ characterization of the films enabled the effects of oxidation during atmospheric exposure of the films to be reduced or eliminated. Conducting the investigations as a function of film thickness enabled spectral features associated with the bulk of the films and with the film/substrate interface to be identified. Infrared spectra of plasma polymerized acetylene films on iron substrates were characterized by a band near 3325 cm@super -1@ that was tentatively assigned to CH stretching in an acetylide species at the interface and by a band near 3300 cm@super -1@ that was assigned to the CH stretching vibration in mono-substituted acetylene groups in the bulk of the films. In a few cases, infrared spectroscopy was used to investigate adsorption of the neat monomers onto the substrates. Thus, infrared spectra of HMDSZ monomer adsorbed onto iron substrates were characterized by bands assigned to siloxane bonds, indicating some polymerization of the monomer.