AVS 45th International Symposium
    Applied Surface Science Division Thursday Sessions
       Session AS-ThP

Paper AS-ThP2
The Münster High Mass Resolution Static SIMS Library

Thursday, November 5, 1998, 5:30 pm, Room Hall A

Session: Aspects of Applied Surface Science Poster Session
Presenter: B.C. Schwede, University of Münster, Germany
Authors: B.C. Schwede, University of Münster, Germany
T. Heller, ION-TOF GmbH, Germany
D. Rading, ION-TOF GmbH, Germany
E. Niehuis, ION-TOF GmbH, Germany
B. Hagenhoff, TASCON GmbH, Germany
L. Wiedmann, University of Münster, Germany
A. Benninghoven, University of Münster, Germany
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Despite the high mass resolution and accurate mass determination available with high-performance TOF-SIMS instruments, the interpretation of a TOF-SIMS spectrum is a tedious process. This paper describes the "Münster High Mass Resolution Static SIMS Library" which can support the user in this situation. The reference spectra were collected with various state-of-the-art TOF-SIMS instruments at the University of Münster, at ION-TOF and at TASCON. The library contains positive and negative spectra from a large variety of substances, with special emphasis on polymers, additives and semiconductor materials. It is structured in a hierarchical, easily extendable manner. All reference spectra are included in the library as interpreted lists of peaks. This library is embedded in the TOF-SIMS IV software package which offers tools like a reference browser or a facility to list all reference spectra which include specified peaks. The evaluation tools are based on a search algorithm specifically designed for the identification of compounds in mixtures. In order to evaluate the similarity of spectra, a version of the PBM algorithm@footnote 1@ was adapted to the specific needs of TOF-SIMS. The performance of the search algorithm was tested by analyzing mixtures of two substances with known composition. The results will be presented and compared to those achieved using principal component analysis (PCA) and neural networks. @FootnoteText@ @footnote 1@ F.W. McLafferty, R.H. Hertel, R.D. Villwock, Organic Mass Spectrometry 1974, Vol. 9, pp. 690-702