AVS 45th International Symposium
    Applied Surface Science Division Thursday Sessions
       Session AS-ThM

Invited Paper AS-ThM3
Resolution Enhancement of XPS Spectra by Maximum Entropy Deconvolution

Thursday, November 5, 1998, 9:00 am, Room 307

Session: Gaede-Langmuir Award Address and Quantitative Surface Analysis
Presenter: N.S. McIntyre, The University of Western Ontario, Canada
Authors: S.J. Splinter, B.C. Research Inc., Canada
N.S. McIntyre, The University of Western Ontario, Canada
Correspondent: Click to Email
Detailed Analysis of XPS spectra is often limited by the resolution available in the measurements. Energy resolution improvement can be achieved in practice by monochromatization of the exciting x-rays and/or by very high energy resolution analysis of the emitted photoelectrons through improved instrumentation. Both of these approaches, however, require expensive high-intensity photon sources. This added cost therefore provides an acute motivation for the development of a reliable computational means for resolution enhancement. In this talk, I will describe a method for enhancing the energy resolution of photoelectron spectra by deconvolution based on the maximum entropy method (MEM). I will first review the theory of deconvolution as applied to XPS and briefly discuss previous work in this area. I will then present the mathematical description of MEM, explaining why this represents a better approach to take, and describe the algorithmic and computational details used to solve the large-scale non-linear constrained optimization problem. Several representative examples of simulated and experimental spectra will be presented.