AVS 45th International Symposium
    Applied Surface Science Division Monday Sessions
       Session AS-MoM

Paper AS-MoM7
Small Area X-ray Photoelectron Spectroscopy using a Spherical Mirror Analyzer

Monday, November 2, 1998, 10:20 am, Room 307

Session: Materials Analysis (including Small Dimensions and Synchrotron)
Presenter: B.J. Tielsch, Kratos Analytical Ltd, United Kingdom
Authors: B.J. Tielsch, Kratos Analytical Ltd, United Kingdom
S.P. Page, Kratos Analytical Ltd, United Kingdom
D.J. Surman, Kratos Analytical, Inc.
S. Scierka, Millenium Inorganic Chemicals
E.A. Thomas, Kent State University
J.E. Fulghum, Kent State University
Correspondent: Click to Email
The analysis of heterogeneous or patterned samples by XPS frequently requires both imaging and small area spectroscopy. As the spatial resolution in photoelectron images decreases, the need for improvements in high energy resolution, small area spectroscopy increases. In most cases, the current limit on small area spectra is ~ 10 microns using either a virtual probe or a focussed x-ray spot. The Kratos AXIS Ultra uses a spherical mirror analyzer for real-time, parallel image acquisition, enabling images with a spatial resolution of 2-4 microns to be acquired in minutes. Spectra are routinely acquired using the hemispherical analyzer, however, the spherical mirror analyzer can be utilized by acquiring a series of images at different binding energies. Spectra can then be calculated from any point within the image by plotting the intensity of the selected pixels as a function of binding energy. We will show spectra determined from images for a variety of samples. The energy resolution obtained with the spherical mirror analyzer will be shown to be comparable to the hemispherical analyzer. The speed of image acquisition means the analysis time is similar to the time required for acquisition of small area spectra in some cases, although better spatial resolution is possible. Using this "images-to-spectra" mode, spectra can be obtained from areas of approximately 5 microns. The spatial resolution will be demonstrated using test samples containing features of known size, and the utility of the "images-to-spectra" mode will be evaluated using composites and polymer blends. This research has been partially supported by NSF (CHE-9631702, CHE-9613880, DMR89-20147) and 3M.