AVS 45th International Symposium
    Applied Surface Science Division Monday Sessions
       Session AS-MoM

Paper AS-MoM10
Evaluation of Ge Based Detectors for Small Area Analysis

Monday, November 2, 1998, 11:20 am, Room 307

Session: Materials Analysis (including Small Dimensions and Synchrotron)
Presenter: X. Lu, Charles Evans & Associates
Authors: X. Lu, Charles Evans & Associates
J.R. Kingsley, Charles Evans & Associates
Correspondent: Click to Email
The development and comercial availability of Energy Dispersive X-ray Spectroscopy (EDS) detectors employing Ge rather than Si detectors, combined with thermally assisted Field Emission Scanning Electron Microscopy (FE-SEM) has allowed EDS to be re-evaluated as a small area analytical tool. The higher spectral resolution of the Ge EDS detector allows lower accelerating voltage to be effectively used for elemental identification, while the thermally assisted FE-SEM has the ability to maintain a usable amount of current, at low voltage, in a spot smaller than the inherent interaction volume. In this paper we will characterize the performance of just such a system when used for particle and IC cross section analysis.