Pacific Rim Symposium on Surfaces, Coatings and Interfaces (PacSurf 2018)
    Thin Films Monday Sessions
       Session TF-MoE

Paper TF-MoE3
Synthesis and Characterization of Pt-Ag Alloyed Thin Films Deposited using Inverted Cylindrical Magnetron Sputtering with a Configurable Target Assembly

Monday, December 3, 2018, 6:20 pm, Room Naupaka Salons 4

Session: Nanostructured Surfaces and Thin Films: Synthesis and Characterization II
Presenter: Saxon Tint, Johnson Matthey Inc.
Authors: S.D. Tint, Johnson Matthey Inc.
G.V. Taylor, Rowan University
E.M. Burkholder, Johnson Matthey Inc.
J.D. Hettinger, Rowan University
S. Amini, Johnson Matthey Inc.
Correspondent: Click to Email
Cylindrical magnetron sputtering cathodes, which sputter from the surface of cylindrical targets, were first described by Penfold and Thornton in the mid 1970’s. They described cathodes that can be built in either post (sputtering outwards) or inverted (sputtering inwards) geometries. Inverted cylindrical magnetrons (ICM) can be used to efficiently and uniformly coat wires, extended objects, and complex geometries for a variety of industrial and medical applications. ICM targets are typically manufactured by roll-forming a flat sheet of a metal or an alloy into a cylinder. However, the mechanical characteristics of some materials preclude this method. An example of this is observed in platinum (Pt) - silver (Ag) alloys that are too brittle to roll-form, thus an alternative target assembly must be used. This work will focus on a systematic study using a configurable target assembly to deposit Pt-Ag alloyed thin films by inward sputtering from an inverted cylindrical cathode for their use as antibacterial/antimicrobial coatings on orthopedic and dental implants. The target assembly comprised of hollow Pt and Ag rings which were stacked in various configurations in order to vary the composition of the final Pt-Ag films. Additionally, varying chamber pressure and cathode power were used to study their effect on film composition and film stress. Finally, film compositional uniformity was investigated throughout the height of the target assembly, which is of particular interest considering the large variation in the size of orthopedic and dental implants ranging from around one to several centimeters in length.