Pacific Rim Symposium on Surfaces, Coatings and Interfaces (PacSurf 2018)
    Thin Films Monday Sessions
       Session TF-MoE

Paper TF-MoE1
Synthesis and Characterization of Novel Nitride Semiconductor Thin Films

Monday, December 3, 2018, 5:40 pm, Room Naupaka Salons 4

Session: Nanostructured Surfaces and Thin Films: Synthesis and Characterization II
Presenter: Andriy Zakutayev, National Renewable Energy Laboratory
Authors: S.R. Bauers, National Renewable Energy Laboratory
A. Holder, National Renewable Energy Laboratory
S. Lany, National Renewable Energy Laboratory
A. Zakutayev, National Renewable Energy Laboratory
Correspondent: Click to Email

Nitride thin films have proven to be an invaluable class of materials with a broad range of uses. Examples include transition metal (TM) nitride rocksalts used as hard-wearing industrial and decorative coatings, and semiconducting III-N wurtzites with exceptional optoelectronic properties. We used high-throughput experimental and computations tools to investigate new inorganic ternary nitrides that have previously received very little attention. Specifically, we focused on heterovalent II-IV-N analogues to well-known III-N binary nitrides, most of which had not been reported in crystallographic databases.

Thin films of Mg-TM-N (TM=Ti, Zr, Hf, Nb, Mo) have been made by combinatorial sputtering, which has allowed for rapid investigation of how film stoichiometry and growth conditions affect properties. Most of the Mg-based ternary compounds form as rocksalt derived structure, with the transition metal in the high valence state. In each case, the heterovalent ternary space provides for tunable properties, characterized by composition-dependent metallic to semiconducting transition. When grown Mg-rich, the materials exhibit semiconducting visible-range optical absorption onsets and mobilities near 1 cm2/Vs – quite high as for nanocrystalline thin films. The calculated indirect bandgaps are in the visible - near IR range (0.9-2.4 eV), and the calculated static dielectric constants are large (30-80).

Finally, the lattice parameters fall within the range of existing nitrides, suggesting compatibility with established growth techniques and possibility for epitaxial integration of these materials into functional nitride devices. This structural compatibility, along with the tunable properties, make these new nitrides promising materials for various electronic applications