| AVS 64th International Symposium & Exhibition | |
| Vacuum Technology Division | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 1:40pm | VT-MoA1 Invited Paper Weight of Water on the Solid Surface in Air and Vacuum Richard Green, National Research Council of Canada, Canada |
| 2:20pm | VT-MoA3 Hydrogen Measurement using a Thermal Desorption Spectrometer JongYeon Lim, Korea Research Institute of Standards and Science, Republic of Korea, K.D. Kim, H.S. Oh, C.H. Lim, Y.D. Joh, Infinity Vacuum Technology, Republic of Korea |
| 2:40pm | VT-MoA4 Automatic Flowmeter and Dynamic Expansion System for UHV/XHV Studies James Fedchak, J. Scherschligt, D. Barker, S. Eckel, NIST |
| 3:00pm | VT-MoA5 Invited Paper Development of a New UHV/XHV Pressure Standard (Cold Atom Vacuum Standard) Julia Scherschligt, J.A. Fedchak, S. Eckel, D. Barker, NIST |
| 4:00pm | VT-MoA8 Invited Paper VTD Early Career Award Invited Talk: Modern Metrology Practice for Calibration and Reliability Testing of Vacuum Measurement Products Scott Heinbuch, MKS Instruments, Inc. |
| 4:40pm | VT-MoA10 Outgassing Rate Measurements of New Materials at NIST Makfir Sefa, J.A. Fedchak, J. Scherschligt, A. Zeeshan, NIST |
| 5:00pm | VT-MoA11 Scaling up an Ion Implant Process Chamber Cryopumping for 450mm Wafer Processing Steve Borichevsky, Applied Materials, Varian Semiconductor Equipment |