AVS 64th International Symposium & Exhibition
    Vacuum Technology Division Monday Sessions

Session VT+MN-MoM
Progress with Measurement in Vacuum

Monday, October 30, 2017, 8:20 am, Room 7 & 8
Moderators: Martin Wüest, INFICON Ltd., Liechtenstein, Steve Borichevsky, Applied Materials, Varian Semiconductor Equipment


  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:20am VT+MN-MoM1
New Vacuum Standard by Ultra-Precise Refractive Index Measurement
Jay Hendricks, J.E. Ricker, J.A. Stone, P. Egan, G.E. Scace, K.O. Douglass, D.A. Olson, G.F. Strouse, NIST
8:40am VT+MN-MoM2
Construction and Testing of the NIST Variable Length Optical Cavity Pressure Standard
Jacob Ricker, J. Hendricks, G.E. Scace, P. Egan, J.A. Stone, NIST
9:00am VT+MN-MoM3 Invited Paper
Fast-Switching Dual Fabry-Perot Cavity-based Optical Refractometry – A Powerful Technique for Drift-Free Assessment of Gas Refractivity and Density
Ove Axner, I. Silander, T. Hausmaninger, Umeå University, Sweden, M. Zelan, RISE Research Institutes of Sweden, Sweden
9:40am VT+MN-MoM5
Cold Cathode Gauge Improvements Extend Performance into UHV Pressure Range
Timothy Swinney, G. Brucker, MKS Instruments, Inc., Pressure and Vacuum Measurement Group
10:00am VT+MN-MoM6
Sapphire MEMS based Capacitance Diaphragm Vacuum Gauge for 0-0.1Torr Operating at 200 °C
Takuya Ishihara, Azbil Corporation, Japan, M. Sekine, M. Soeda, M. Nagata, Azbil Corporation
10:40am VT+MN-MoM8 Invited Paper
ROSINA/Rosetta: Exploring the Origin of our Solar System with Mass Spectrometry in Space
Kathrin Altwegg, University of Bern, Switzerland
11:20am VT+MN-MoM10
Stabilization of Emission Current from Cold Field Emitters by Reducing Pressure to 10-10 Pa
Keigo Kasuya, T. Ohshima, S. Katagiri, T. Kawasaki, Hitachi, Ltd., Japan
11:40am VT+MN-MoM11
Measurement and Prediction of Quadrupole Mass Spectrometer Sensitivities
Robert Ellefson, REVac Consulting