AVS 64th International Symposium & Exhibition | |
Vacuum Technology Division | Monday Sessions |
Session VT+MN-MoM |
Session: | Progress with Measurement in Vacuum |
Presenter: | Ove Axner, Umeå University, Sweden |
Authors: | O. Axner, Umeå University, Sweden I. Silander, Umeå University, Sweden T. Hausmaninger, Umeå University, Sweden M. Zelan, RISE Research Institutes of Sweden, Sweden |
Correspondent: | Click to Email |
Since pressure has a temperature dependence it is not trivial to accurately assess gas amounts by pressuring measuring devices. However, the (number) density does not suffer from such limitations. Optical Refractometry (OR) is a powerful technique for assessment of gas refractivity and density. The highest resolution is obtained when performed in a Fabry-Perot (FP) cavity. In FP-Cavity based OR (FPC-OR) the change in the frequency of laser light, locked to a longitudinal mode of a FP cavity, is monitored while the amount of gas in the cavity is being changed. Since frequency is an entity that can be assessed with enormous precision, the precision of FPC-OR can be extremely high. However, although potentially very powerful, FPC-OR is often limited by thermal deformation of the spacer between the mirrors. A partial remedy to this is to use two FP cavities, termed Dual FPC-OR (DFPC-OR).
We have prophesied that if measurements could be done under drift free conditions, the technique would be able to circumvent most of these limitations. A possible strategy for drift-free DFPC-OR, termed fast switching DFPC-OR (FS-DFPC-OR), is presented in which measurements are made under such short times that the drifts of the cavity can be disregarded. The methodologies developed circumvent the problem with volumetric expansion, i.e. that the gas density decreases when gas is let into the measurement cavity by performing a pair of measurements in rapid succession; the first one assesses the density of the gas transferred into the measurement cavity by the gas equilibration process, while the second automatically calibrates the system with respect to the ratio of the volumes of the measurement cavity and the external compartment. The methodologies for assessments of leak rates comprise triple cavity evacuation assessments, comprising two measurements performed in rapid succession, supplemented by a third measurement a given time thereafter.
We predict that refractivity and density can be assessed, under STP conditions, with a precision in the 10-9 range. The absolute accuracy is expected to be given by the calibration source. If characterized with respect to an internal standard, the accuracy can be several orders of magnitude better. The temperature dependence of FS-DFCB-OR is exceptionally small, typically in the 10-8 - 10-7/°C range, primarily caused by thermal expansion of the spacer material.
A first realization of a FS-DFCB-OR set up for assessments of gas refractivity and density will be presented and its performance will be demonstrated. We will discuss how to design an FS-DFCB-OR system for optimal performance for assessments of gas refractivity and density.