AVS 64th International Symposium & Exhibition | |
Advanced Ion Microscopy Focus Topic | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
HI-ThP1 Sub-10 nm Width High Aspect Ratio Trench Patterning of Gold Film using Helium Ion Microscope Etsuo Maeda, The University of Tokyo, Japan, T. Iijima, National Institute of Advanced Industrial Science and Technology (AIST), Japan, R. Kometani, The University of Tokyo, Japan, S. Migita, S. Ogawa, National Institute of Advanced Industrial Science and Technology (AIST), Japan |
HI-ThP2 Optimized ex situ Lift Out of FIB Prepared Specimens Lucille Giannuzzi, EXpressLO LLC |