Paper TF-ThP20
Carbon Thin Films Prepared by the Ion Assistance the Mass Spectrometric Analysis Type

Thursday, November 2, 2017, 6:30 pm, Room Central Hall

Recently, single-layer graphene sheets, diamond thin films, carbon nitride (C₃N₄) have attracted attention as a functional carbon thin film. Among them, DLC (Diamond-Like Carbon) is an amorphous carbon film showing characteristics which are close to that of diamond. Since those characteristics are high hardness, low friction coefficient, etc., DLC is used in a mechanical field such as sliding machine parts or engine parts.Practical application progresses rapidly in which tribology field, life expectancy has increased, maintainers

Contributing to Reducing Frequency In recent years, as a new characteristic of DLC gas barrier

Biocompatibility, etc. are recognized and it is expected to be applied to food containers, medical instruments, etc.

In our experiment, Ar⁺, N₂⁺, He⁺ ion beam was used with evaporation to DLC films. This deposition method has some independent parameters from the film formation condition in comparison with other dry process methods. Therefore this method is anticipated in appearance of superior characteristics such as a high adhesion. In our previous research,

In our laboratory, we used Ar^＋, N₂^＋, He^＋ as the ion species so far,

DLC film formation was carried out by an ion beam assist method in which toluene (C ₇ H ₈) was introduced.

As a result of the investigation, by setting the ion species to Ar^＋, the sp ³ ratio of the structure is maximized.

Although improvement of mechanical properties was expected, high-energy Ar^＋ion irradiation turned out to be a factor of the increasing graphite structure. Therefore, further structural control is considered necessary to deposit DLC by low energy ions. In this study, we investigate various characteristics of DLC thin film by mass spectrometry type ion beam and compare it with DLC thin film with straight type ion beam.