| AVS 64th International Symposium & Exhibition | |
| MEMS and NEMS Group | Wednesday Sessions |
| Session MN+2D-WeM |
| Session: | 2D NEMS |
| Presenter: | Berg Dodson, Brigham Young University |
| Authors: | B. Dodson, Brigham Young University G. Chen, Brigham Young University R.R. Vanfleet, Brigham Young University R.F. Davis, Brigham Young University |
| Correspondent: | Click to Email |
We demonstrate a carbon nanotube based, high aspect ratio (~1 mm tall and 20 um diameter posts) multi-electrode array with individually addressable electrodes. The mechanical robustness and electrical conductivity of the carbon nanotubes make them a good candidate for the multi-electrode array. The electrode is made out of CNT posts which were grown on a patterned conductive substrate and kept vertically aligned with supporting hedges. The supporting hedges were subsequently removed to leave an isolated CNT post array. The fabrication method makes the structure compatible with a variety of surface coatings, including carbon, metals, and ceramics. Good electrical connection is made to individual elements of the array despite the insulating alumina barrier that is used between the substrate and CNT forests.