AVS 64th International Symposium & Exhibition
    MEMS and NEMS Group Wednesday Sessions
       Session MN+2D-WeM

Paper MN+2D-WeM11
NEMS on Flexible Substrates for Strain Engineering in Sensing Applications

Wednesday, November 1, 2017, 11:20 am, Room 16

Session: 2D NEMS
Presenter: Swapnil More, Indian Institute of Science, India
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Although nanoelectromechanical systems (NEMS) utilizing 2D material are potent instruments for ultra-sensitive mass spectroscopy, the onset of nonlinearities severely reduces their dynamic range. However, strain tuning of dynamic range is possible if the strain is introduced by methods other than electrostatic gating. Here, we present a method for the fabrication of nanoelectromechanical resonators (NEMRs) from 2D materials on flexible substrate, which allows straining devices through substrate bending, which is independent of electrostatic excitation of the of the resonator. This device platform can be a basis for studying dynamic range of NEMRs as a function of strain in the resonating membrane, along with studying new novel concepts for sensors involving strain engineering. With the advent of new 2d materials having exotic strain dependent properties, strain engineering opens whole new set of opportunities for the sensing technologies employing NEMS, other than strain tunable dynamic range.