AVS 64th International Symposium & Exhibition
    Applied Surface Science Division Monday Sessions
       Session AS+BI+MI-MoM

Paper AS+BI+MI-MoM6
Combining Monoatomic- and Cluster Ion Sputtering in ToF-SIMS and XPS Depth Profiling of Organic-inorganic Multilayer Structures

Monday, October 30, 2017, 10:00 am, Room 13

Session: Practical Surface Analysis: Getting the Most Out of Your Analysis using Complementary Techniques
Presenter: Eric Langer, CEA-Leti, France
Authors: E. Langer, CEA-Leti, France
J.-P. Barnes, CEA-Leti, France
O.J. Renault, CEA-Leti, France
T. Maindron, CEA-Leti, France
L. Houssiau, University of Namur, Belgium
Correspondent: Click to Email

Organic electronics have risen to great importance in the world of consumer electronics. Especially organic light emitting diode (OLED) displays have brought new possibilities to the market. However, organic materials are more susceptible to electrical dysfunctions than conventionally used inorganic materials. This leads to a shortened lifetime for those materials. Environmental impacts like humidity or ultraviolet irradiation can create chemical reactions that lead to dark spots and device failures. Additionally, the flow of current through the device can further promote device degradation and can even induce migration and diffusion of dopants and small molecules. Precise chemical depth profiling is therefore essential to identify sources of failure and improve the device lifetime of organic electronics. Surface analysis techniques such as time-of-flight secondary ion mass spectrometry (ToF-SIMS) and x-ray photoelectron spectroscopy (XPS) are efficient tools to characterize the chemical composition in depth. With the recent introduction of gas cluster ion beam (GCIB) sources, it is possible to sputter through organic materials without inducing a significant amount of damage to the sample [1]. Typically, argon clusters (1000 – 5000 atoms per cluster) with low energy per atom ratios (1 – 5 eV/atom) are used for gentle sputtering. However, these low energies are not sufficient to break the atomic bonds in inorganic materials. This poses a major problem in the characterization of hybrid inorganic-organic devices.

In this work, we present an approach to overcome the difficulties in depth profiling of inorganic-organic interfaces. Green OLED devices are characterized by ToF-SIMS depth profiling using GCIB as well as monoatomic sources for sputtering. This allows for precise tracking of characteristic chemical species in both the inorganic and the organic parts of the multilayer structures. Additionally, XPS depth profiling is used to measure the sputter induced damage during analysis [2]. We show, that by optimizing the sputter parameters, the sputter induced damage can be minimized and precise and reliable chemical information of hybrid inorganic-organic devices can be gained by combining ToF-SIMS and XPS analysis.

This work was carried out on the Platform for Nanocharacterization (PFNC) at the CEA Grenoble.

[1] Ninomiya, S ; Ichiki, K ; Yamada, H ; Nakata, Y ; Seki, T ; Aoki, T ; Matsuo, J Rapid Comm. Mass Spec. 23 20 (2009) 3264.

[2] Miyayama, T ; Sanada, N ; Bryan, SR ; Hammond, JS ; Suzuki, M ; Surf. Interface Anal. 42 9 (2010) 1453