| AVS 62nd International Symposium & Exhibition | |
| Thin Film | Tuesday Sessions |
| Session TF+EM+MI+MS-TuM |
| Session: | ALD for Alternative Devices |
| Presenter: | Yichuan Ding, Stanford University |
| Authors: | Y. Ding, Stanford University R.H. Dauskardt, Stanford University |
| Correspondent: | Click to Email |
Reliable bonding of organic/inorganic interfaces continues to be one of the most important challenges in multilayer devices including microelectronic, photovoltaic and display technologies. Hybrid molecular materials which contains both organic and inorganic components has been shown to be well suited for bonding organic/inorganic (metals, metal-oxides, nitrides, …) interface, mitigating moisture degradation and even stress migration. The hybrid films (less than 100nm) made of two primary precursors, an epoxysilane and a zirconium alkoxide, have been deposited via solution based synthesis, with low cost and high throughput. By optimizing sol-gel chemistry and processing conditions, we achieved an impressive tenfold improvement in interfacial adhesion at the epoxy/Si substrate interface, and have proven the suppression of moisture degradation at the interface.
In this work, we emphasized on our newly developed spray deposition technique with more versatility and better suited to large-scale manufacturing. We utilized both bilayer coating and dual-sources spray strategies to create highly compositionally and functionally graded hybrid film compared with films achieved via traditional dip-coating. XPS depth profiling shows highly graded hybrid films with independent compositional control within 80nm can be achieved via spray coating in the dry regime. We took advantage of the compositional control brought by spray coating to unravel the structure-property relationships in the multi-functional hybrid films by varying components/parameters to fine tune the molecular structure of the resulting film and relate that to its properties obtained from our advanced thin-film mechanical testing techniques together with other chemical characterization techniques (XPS, FTIR, NMR and GCMS). The evolution of the hybrid molecular network during film process and how molecular level details of the hybrid film has a large effect on its mechanical properties were better understood.