AVS 62nd International Symposium & Exhibition | |
Surface Science | Thursday Sessions |
Session SS+AS+EM+EN-ThM |
Session: | Semiconductor Surfaces and Interfaces - I |
Presenter: | Tatiana P. Chopra, University of Texas at Dallas |
Authors: | T.P. Chopra, University of Texas at Dallas R.C. Longo, University of Texas at Dallas K.J. Cho, University of Texas at Dallas M.D. Halls, Schrodinger, Inc. P. Thissen, Karlsruhe Institute of Technology, Germany Y.J. Chabal, University of Texas at Dallas |
Correspondent: | Click to Email |
In this work, the attachment of liquid and vapor-phase ethylenediamine on three types of oxide-free (H-, F- and Cl-terminated) Si(111) surfaces is examined by infrared absorption spectroscopy and X-ray photoelectron spectroscopy in conjunction with first-principles calculations. We find that chemisorption is only possible on F- and Cl-terminated Si surfaces, with H-terminated Si surfaces yielding only physisorbed diamine molecules. On Cl-terminated Si surfaces, diamines adsorb in a mixture of monodentate and bridging configurations (chemical reaction of both amine endgroups), while on partially F-terminated Si surfaces the adsorption occurs primarily at one end of the molecule. The reaction of ethylenediamine with Cl-terminated Si surfaces is also characterized by complete removal of Cl and partial Si-H (~25% ML) formation on the surface. This unexpected result suggests that a proton-chlorine exchange may take place, with the endothermic barrier possibly reduced via a silicon lattice assisted process after an initial attachment of ethylenediamine to the surface.