| AVS 62nd International Symposium & Exhibition | |
| Applied Surface Science | Thursday Sessions |
| Session AS-ThP |
| Session: | Applied Surface Science Poster Session |
| Presenter: | Wickramaarachchige Lakshantha, University of North Texas |
| Authors: | W. Lakshantha, University of North Texas M. Dhoubhadel, University of North Texas F. McDaniel, University of North Texas B. Rout, University of North Texas |
| Correspondent: | Click to Email |
In recent years, the interest in ternary metal (iron) silicides system is triggered by its potential use in advanced silicon based opto-electronic devices. However the ternary silicides have been by far less studied than their binary counterparts despite the fact that they might be beneficial in decreasing the formation temperature of disilicides. The phase formation of ternary silicides is not well understood, because most often the ternary silicides are formed in metastable phases. Among the well-known synthesis techniques to form or modify the composition and physical properties of thin films, low energy ion implantation has shown to be a very powerful technique. The ternary metal silicides can be synthesized by sequentially implantation of two metals into a Si substrate. In this study, Fe-Co-Si & Fe-Ti-Si ternary phases were formed by sequentially implanting either Co or Ti, along with Fe into Si (100) at room temperature (RT). Dynamic ion implantation simulation was performed to determine the ion fluences for concentration saturation of implant ions in the Si matrix. Then the optimal saturation fluences of each ions were implanted at 50 keV into Si substrates. Further same implantation process were performed under an externally applied magnetic field. The samples were subsequently annealing at temperature ranging from 200 – 600 oC. X-ray diffraction (XRD) analysis shows that even without annealing significant amount of ternary phase formation for ion implantation under external magnetic field. Further structural evolutions of ternary phases were observed with the annealing temperature. X-ray photoelectron spectra show core-level (Fe 2p3/2 & 3s) spectral asymmetry and splitting in these transition metal compounds. We believe this is the direct evidence of high Density of State (DOS) at valance band and a local moment in the ternary compounds.