AVS 61st International Symposium & Exhibition
    Plasma Science and Technology Friday Sessions
       Session PS1-FrM

Paper PS1-FrM8
Controlling the Flux of Reactive Species in Electron Beam Generated Plasmas

Friday, November 14, 2014, 10:40 am, Room 305

Session: Plasma Sources
Presenter: Scott Walton, Naval Research Laboratory
Authors: S.G. Walton, Naval Research Laboratory
D.R. Boris, Naval Research Laboratory
E.H. Lock, Naval Research Laboratory
S.C. Hernandez, Naval Research Laboratory
Tz.B. Petrova, Naval Research Laboratory
G.M. Petrov, Naval Research Laboratory
Correspondent: Click to Email
Electron beam generated plasmas are characterized by high plasma densities (> 10 9 cm-3) and very low electron temperatures (< 1 eV), making them well-suited for next-generation processing techniques where high fluxes of low energy ions are desirable. In this work, we focus on controlling the flux of reactive species incident to substrates located adjacent to magnetically collimated electron beam generated plasmas. In particular, we discuss strategies for regulating both the type and energy of the ions at the substrate surface. We use a suite of diagnostics including Langmuir and RF impedance probes along with a mass-resolved ion energy analyzer to show how various operating parameters can be changed to control both the bulk plasma properties and the ion flux at the surface. This work is supported by the Naval Research Laboratory Base Program.