AVS 61st International Symposium & Exhibition
    Plasma Science and Technology Friday Sessions
       Session PS1-FrM

Paper PS1-FrM11
Ion Energy Distribution Control Using Phase Locked Harmonic Drive

Friday, November 14, 2014, 11:40 am, Room 305

Session: Plasma Sources
Presenter: Steven Shannon, North Carolina State University
Authors: A. Zafar, North Carolina State University
Y. Zhang, University of Michigan
T. Kummerer, North Carolina State University
D.H. Clark, Plasmatherm Inc.
M.J. Kushner, University of Michigan
D. Coumou, MKS Instruments
S. Shannon, North Carolina State University
Correspondent: Click to Email
Dual frequency RF power delivery has demonstrated the capability to increase the operating range of industrial plasmas including independent control of electron density and sheath bias and control of ion energy distribution function (IEDF) width. In this talk, we focus on the later demonstration and present a method for enhanced control of IEDF shape by utilizing a dual frequency drive where harmonic frequencies are employed and the relative phase of these two applied waveforms is controlled. We will show that by controlling both current ratio and phase angle, not only can the width of the distribution be controlled, the higher order moments (specifically distribution skew) can also be controlled, providing distribution functions that are either skewed toward the low energy peak of a typical bimodal RF driven IEDF or skewed toward the high energy peak. Experimental and simulated results will be presented for both dual frequency and three frequency configurations.