AVS 61st International Symposium & Exhibition
    Plasma Science and Technology Tuesday Sessions
       Session PS-TuP

Paper PS-TuP9
Characterization and Simulation of a VHF Remote Plasma Source

Tuesday, November 11, 2014, 6:30 pm, Room Hall D

Session: Plasma Science and Technology Poster Session
Presenter: Scott Polak, Advanced Energy Industries
Authors: S. Polak, Advanced Energy Industries
D. Carter, Advanced Energy Industries
A. Bhoj, ESI US R&D Inc.
A. Roy, ESI US R&D Inc.
Correspondent: Click to Email
This paper describes a novel, remote source technology using capacitively coupled, VHF energy to produce a flexible and unique plasma generator. The electrode design and internal construction are compatible with most processing chemistries, allowing generation of very low to very high plasma densities across extensive flow and pressure regimes. Furthermore, Langmuir and IEDF probe measurements have illustrated a competency of the remote source to deliver plasma well beyond the output of the apparatus, into large downstream chambers. This ability makes both neutral-radical and downstream ion enhanced processing possible. Due to the enhanced efficacy of this remote plasma source, optimization and characterization across the wide operating range becomes challenging. To facilitate characterization of the remote source and to augment empirical testing, plasma simulation techniques are employed. Commercially available, multi-physics code, CFD-ACE+, is used to simultaneously solve for the electromagnetics, fluid flow, heat transfer, species chemistry and transport equations for non-equilibrium discharges. A summary of the important remote source design elements will be reviewed along with a comparison of actual and simulated results, illustrating details of the plasma generation and distribution from this new technology.