AVS 61st International Symposium & Exhibition
    Plasma Science and Technology Tuesday Sessions
       Session PS-TuP

Paper PS-TuP22
A Low Cost and Flexible Microplasma Generation Device to Create Hydrophobic/Hydrophilic Contrast on Nonflat Surfaces

Tuesday, November 11, 2014, 6:30 pm, Room Hall D

Session: Plasma Science and Technology Poster Session
Presenter: Yao-Jhen Yang, National Taiwan University, Taiwan, Republic of China
Authors: Y.J. Yang, National Taiwan University, Taiwan, Republic of China
C.C. Hsu, National Taiwan University, Taiwan, Republic of China
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This work presents a cost-effective (less than a quarter per device) and easy-to-fabricate dielectric-barrier-discharge-type (DBD-type) microplasma generation device for maskless surface patterning. This device was made of double-side copper laminate. A process to define circuit patterns on printed circuit board was utilized to define the electrodes required for the microplasma generation device. This device was then utilized for maskless surface patterning, either creating hydrophobic patterns on hydrophilic surfaces or hydrophilic patterns on hydrophobic surfaces. The former patterns were obtained by plasma polymerization of c-C4F8 precursor under He atmosphere to form fluorocarbon on designated regions on glass surfaces. The optical emission spectrum shows the CF2 emission (250 nm-380 nm), suggesting the dissociation of precursor molecules. The FTIR spectrum of the deposited film shows strong CF2 absorption peak at 1250 cm-1. The contact angle of the film ranges from 102 to 105 degree. The hydrophilic patterns on hydrophobic surfaces were obtained by treating a fluorocarbon-coated surface using this plasma-generation device under ambient air. Non-flat surface patterning using this device will be demonstrated. (This work was supported by National Science Council of Taiwan, the Republic of China 101-2221-E-002-163-MY2)