| AVS 61st International Symposium & Exhibition | |
| Plasma Science and Technology | Tuesday Sessions |
| Session PS-TuP |
| Session: | Plasma Science and Technology Poster Session |
| Presenter: | Chih-Ming Wang, National Taiwan University, Taiwan, Republic of China |
| Authors: | C.M. Wang, National Taiwan University, Taiwan, Republic of China T.H. Lin, National Taiwan University, Taiwan, Republic of China Y.J. Yang, National Taiwan University, Taiwan, Republic of China C.C. Hsu, National Taiwan University, Taiwan, Republic of China |
| Correspondent: | Click to Email |
Microplasmas are plasmas with geometric dimension less than 1 mm. Due to its miniature size, fabrication of microplasma generation devices frequently involves high cost materials and/or processes, such semi-conductor manufacturing processes. In this work, we present the development of two types of low-cost flexible microplasma generation devices: devices made on paper substrates and on flexible printed circuit board (PCB). The former is made of paper, conductive carbon paste, and tape, while the latter is fabricated using commercially available process that makes printed circuit board. We exam the stability of the discharge and the lifetime of the devices. When the paper-based device is assembled as a dielectric barrier discharge (DBD)-type device, stable array of discharges can be sustained for tens of minutes. When it is assembled as a micro-hollow cathode discharge (MHCD)-type system, no array of discharge can be obtained and the device lifetime is no longer than 3 min. For the PCB-based device, stable array of discharges can be sustained for longer than one hour. The use of the PCB-based device to perform gas conversion is also demonstrated. CO2 decomposition forming CO and O2 is chosen as the system to test. It is shown that the power efficiency above 7% can be obtained under selected conditions.