AVS 61st International Symposium & Exhibition
    Applied Surface Science Thursday Sessions
       Session AS-ThP

Paper AS-ThP10
XPS Sputter Depth Profiling of Organometallic Multilayer Materials Using Massive Argon Cluster Ions

Thursday, November 13, 2014, 6:00 pm, Room Hall D

Session: Applied Surface Science Poster Session
Presenter: Simon Hutton, Kratos Analytical Limited, UK
Authors: S.J. Hutton, Kratos Analytical Limited, UK
T. Bendikov, Weizmann Institute of Science, Israel
W. Boxford, Kratos Analytical Limited, UK
SC. Page, Kratos Analytical Limited, UK
J.D.P. Counsell, Kratos Analytical Limited, UK
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Thin polymer films are found in an enormous range of devices and have many applications from use in semi-conductors, displays and solar cells to corrosion protection and packaging. New ion sources such as the multi-mode Ar gas cluster ion source (GCIS) have revolutionised the study of such organic thin films by depth profiling with techniques such as X-ray photoelectron spectroscopy (XPS). As reported elsewhere the chemical composition of organic thin films may now be determined as a function of depth by a combination of XPS analysis and etching using massive Ar ions.

In this study we present results from XPS gas cluster depth profiling of multi-layer organometallic thin films. The multi-layer structures are formed by sequential immersion of a pyridine-terminated template layer on silicon or ITO-coated glass substrates.