AVS 60th International Symposium and Exhibition
    Advanced Surface Engineering Thursday Sessions

Session SE+PS-ThM
Pulsed Plasmas in Surface Engineering (8:00-10:00 am)/Atmospheric Pressure Plasmas (10:40 am-12:00 pm)

Thursday, October 31, 2013, 8:00 am, Room 203 C
Moderators: H. Barankova, Uppsala University, Sweden, J. Klemberg-Sapieha, Ecole Polytechnique de Montreal, Canada

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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:00am SE+PS-ThM1 Invited Paper
A 60 Year Perspective on Developments in Plasma Assisted PVD Processes for Enhanced Surface Engineered Performance
A. Matthews, University of Sheffield, UK
8:40am SE+PS-ThM3
Optimized Magnetic Field Configuration for High Power Impulse Magnetron Sputtering
P. Raman, L. Meng, H. Yu, D.N. Ruzic, University of Illinois at Urbana Champaign, M. Schilling, Dexter Magnetic Technologies, Inc, S. Amstrong, Kurt J. Lesker Company
9:20am SE+PS-ThM5
HiPIMS Deposition of Semiconducting ZnO Thin Films
A.N. Reed, P.J. Shamberger, Air Force Research Laboratory, Wright Patterson Air Force Base, C. Muratore, University of Dayton, J.E. Bultman, University of Dayton Research Institute, A.A. Voevodin, Air Force Research Laboratory, Wright Patterson Air Force Base
9:40am SE+PS-ThM6
Si3N4 Spacers Etching in Synchronized Pulsed CH3F/O2/He/SiF4 Plasmas
R. Blanc, STMicroelectronics, France, M. Darnon, G. Cunge, O. Joubert, LTM – MINATEC – CEA/Leti, France
10:40am SE+PS-ThM9
CO2 Conversion to CO and O2 by DBD Plasma at Atmospheric Pressure
G. Arnoult, T. Bierber, A. Ozkan, P. De Keyzer, F.A.B. Reniers, Université Libre de Bruxelles, Belgium
11:00am SE+PS-ThM10
Cold Atmospheric Plasma Assisted Production of Hydrogen
L. Bardos, H. Baránková, Uppsala University, Sweden
11:20am SE+PS-ThM11
Optical Emission Spectroscopy of He Dielectric Barrier Discharges at Atmospheric-Pressure Applied to the Functionalization of Wood Surfaces
L. Stafford, R.K. Gangwar, O. Levasseur, Universite de Montreal, Canada, N. Gherardi, CNRS-LAPLACE, France, N. Naudé, Universite Paul-Sabatier, France
11:40am SE+PS-ThM12
Substitution of ThO2 by La2O3 for Tungsten Electrodes used in Atmospheric Plasma Spraying
M. Heissl, C. Mitterer, Montanuniversitaet Leoben, Austria, T. Granzer, J. Schroeder, M. Kathrein, PLANSEE Composite Materials GmbH, Germany