| AVS 60th International Symposium and Exhibition | |
| Electronic Materials and Processing | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| EM-ThP1 Hot Fire Chemical Vapor Deposited Silicon-rich Oxides: Its Optical and Compositional Properties A. Benítez, J.A.L Luna, G. García, D. Vázquez, J. Carrillo, K. Monfil, Benemérita Universidad Autónoma de Puebla, Mexico, A. Morales, Centro de Investigación en Materiales Avanzados, Mexico |
| EM-ThP2 Effect of Co-implantation of Nitrogen and Fluorine on the Total Dose Radiation Response of the Buried Oxide Layer of SOI Materials Z.S. Zheng, Institute of Microelectronics of Chinese Academy of Sciences, China |
| EM-ThP3 The Effects of Water Uptake on the Mechanical Properties of Low-k Organosilicate Glass X. Guo, University of Wisconsin-Madison, J. Jakes, USDA Forest Service Forest Products Laboratory, M. Nichols, University of Wisconsin-Madison, S. Banna, Applied Materials Inc., Y. Nishi, Stanford University, J.L. Shohet, University of Wisconsin-Madison |
| EM-ThP4 Study of Phosphorus-doped Polysilicon Films using Si3H8 by Ultra-high Vacuum Chemical Vapor Deposition B. Kim, H. Jang, D.-S. Byeon, S. Koo, D.-H. Ko, Yonsei University, Republic of Korea |
| EM-ThP5 Electrical Properties of Atomic-Layer-Deposited Al-doped TiO2 Films on p-type GaAs Y. An, Y.-C. Byun, S. Choi, H. Kim, Sungkyunkwan University, Republic of Korea |
| EM-ThP6 Surface Deactivation of SiO2 using Octadecyltrichlorosilane Based Self-Assembled Monolayers A. Hinckley, A.J. Muscat, University of Arizona |
| EM-ThP7 Investigation of Dual-Active-Layered Zinc–Tin–Oxide/Indium–Gallium–Zinc–Oxide Thin-Film Transistors with the Durability of the Chemical Damage C.H. Kim, H.J. Kim, Yonsei University, Republic of Korea |
| EM-ThP9 Comparison of Properties of FTO and ITO Films with Different Concentrations J.A.L Luna, M. Meneses, J. Carrillo, F. Flores, A. Morales, J. Martínez, J. Sosa, E. Gómez, K. Monfil, A. Benítez, Benemérita Universidad Autónoma de Puebla, Mexico |
| EM-ThP10 Optical Monitoring of Vapor Induced Phase Separation During Spin Coating of PVDF N. Dawson, K. Malloy, University of New Mexico |
| EM-ThP12 High-efficiency Semipolar GaN-based Light Emitting Diodes Fabricated by Wet Chemical Etching S. Jung, Chonbuk National University, Republic of Korea, S.-N. Lee, Korea Polytechnique University, Republic of Korea, H. Kim, Chonbuk National University, Republic of Korea |
| EM-ThP13 Characterization of Non-Stoichiometric Zinc Tungstate Thin Films S.T. King, E.M. Dinauer, J.S. Krueger, B.R. Zink, Z.C. Koop, University of Wisconsin - La Crosse |
| EM-ThP17 Development of Chalcogenide Materials for Inline Phase Change Switches (IPCS) for RF Applications M.R. King, B.P. Wagner, E.B. Jones, N. El-Hinnawy, S.R. McLaughlin, P. Borodulin, J.S. Mason, Jr., R.S. Howell, R.M. Young, M.J. Lee, Northrop Grumman ES |