| 8:00am |
TF2-ThM1
Aluminum Molecular Model for DSMC Simulations of Thin Film Deposition
A. Venkattraman, Alina Alexeenko, Purdue University |
| 8:20am |
TF2-ThM2
ISSG Chemistry Modeling to Understand Uniformity Issues in RTP
Shailesh Gupta, U. Kelkar, Applied Materials, Inc. |
| 8:40am |
TF2-ThM3 Invited Paper
Composition and Finite Size Effects in Thin Magnetic Films for Data Storage Applications: Magnetic and Transport Properties
Oleg Mryasov, University of Alabama |
| 9:20am |
TF2-ThM5
Large Scale TiN Thin Films Growth Simulations via Improved Modified Embedded Atom Parameterization
D.G. Sangiovanni, Valeriu Chirita, L. Hultman, Linkoping University, Sweden, I. Petrov, J.E. Greene, University of Illinois at Urbana Champaign |
| 9:40am |
TF2-ThM6
Hard, yet Tough, Transition Metal Nitride Thin Films by Alloying and Valence Electron Concentration Tuning
Davide Sangiovanni, V. Chirita, L. Hultman, Linkoping University, Sweden |
| 10:40am |
TF2-ThM9
Using Crystallographic Space Group-Subgroup Relations to Analyze Phase Selection and Transition in HfO2 and Hf-based Ternary Oxide Films
Carolyn Aita, University of Wisconsin-Milwaukee |
| 11:00am |
TF2-ThM10
Experimental and Theoretical Investigations Using SiO2 Nanotemplates to Relieve Stress Caused by Thermal Expansion Coefficient Mismatch in Epitaxial Germanium Grown on Silicon
Swapnadip Ghosh, D. Leonhardt, S.M. Han, University of New Mexico |
| 11:20am |
TF2-ThM11
Controlling Heteroepitaxy through Surfactant-Enabled Growth: An Ab Initio Thermodynamics Study
B.E. Gaddy, E.A. Paisley, M.D. Losego, J.S. Tweedie, North Carolina State University, R. Collazo, North Carolina State Univeristy, Z. Sitar, D.L. Irving, J.-P. Maria, North Carolina State University |
| 11:40am |
TF2-ThM12
Deposition and Modeling of Nanoscale Organic Porous Polymeric Layers and their Characterization with Visual and Electrical Methods
G. Franz, Florian Schamberger, Munich University of Applied Sciences, Germany |