| 8:00am |
TF2-ThM1
Aluminum Molecular Model for DSMC Simulations of Thin Film Deposition
A. Venkattraman, A. Alexeenko, Purdue University |
| 8:20am |
TF2-ThM2
ISSG Chemistry Modeling to Understand Uniformity Issues in RTP
S. Gupta, U. Kelkar, Applied Materials, Inc. |
| 8:40am |
TF2-ThM3 Invited Paper
Composition and Finite Size Effects in Thin Magnetic Films for Data Storage Applications: Magnetic and Transport Properties
O.N. Mryasov, University of Alabama |
| 9:20am |
TF2-ThM5
Large Scale TiN Thin Films Growth Simulations via Improved Modified Embedded Atom Parameterization
D.G. Sangiovanni, V. Chirita, L. Hultman, Linkoping University, Sweden, I. Petrov, J.E. Greene, University of Illinois at Urbana Champaign |
| 9:40am |
TF2-ThM6
Hard, yet Tough, Transition Metal Nitride Thin Films by Alloying and Valence Electron Concentration Tuning
D.G. Sangiovanni, V. Chirita, L. Hultman, Linkoping University, Sweden |
| 10:40am |
TF2-ThM9
Using Crystallographic Space Group-Subgroup Relations to Analyze Phase Selection and Transition in HfO2 and Hf-based Ternary Oxide Films
C.R. Aita, University of Wisconsin-Milwaukee |
| 11:00am |
TF2-ThM10
Experimental and Theoretical Investigations Using SiO2 Nanotemplates to Relieve Stress Caused by Thermal Expansion Coefficient Mismatch in Epitaxial Germanium Grown on Silicon
S. Ghosh, D. Leonhardt, S.M. Han, University of New Mexico |
| 11:20am |
TF2-ThM11
Controlling Heteroepitaxy through Surfactant-Enabled Growth: An Ab Initio Thermodynamics Study
B.E. Gaddy, E.A. Paisley, M.D. Losego, J.S. Tweedie, North Carolina State University, R. Collazo, North Carolina State Univeristy, Z. Sitar, D.L. Irving, J.-P. Maria, North Carolina State University |
| 11:40am |
TF2-ThM12
Deposition and Modeling of Nanoscale Organic Porous Polymeric Layers and their Characterization with Visual and Electrical Methods
G. Franz, F. Schamberger, Munich University of Applied Sciences, Germany |