| AVS 58th Annual International Symposium and Exhibition | |
| Plasma Science and Technology Division | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | PS-ThA1 Characterization of Atomic Oxygen Emission by PROES and Ion-Flux Measurement in an ECR Plasma Etcher Vladimir Milosavljevic, Dublin City University, Ireland and University of Belgrade, Serbia, B. Dolinaj, D. Gahan, Impedans Ltd., Ireland, N. Macgarailt, Dublin City University, Ireland, MB. Hopkins, Impedans Ltd., Ireland, S. Daniels, Dublin City University, Ireland |
| 2:20pm | PS-ThA2 Optical Diagnostics of Electron Energy Distributions in Low Temperature Plasmas John Boffard, L.E. Aneskavich, R.O. Jung, C.C. Lin, A.E. Wendt, University of Wisconsin-Madison |
| 2:40pm | PS-ThA3 Invited Paper Two Dimensional Laser-Collision Induced Fluorescence Measurements in Low Pressure Plasmas Edward Barnat, Sandia National Laboratories |
| 3:40pm | PS-ThA6 Controlled Electron Beam Excitation Method to Study Process Chemistries P.L. Stephan Thamban, G. Padron-Wells, University of Texas at Dallas, J. Hosch, Verity Instruments Incorporated, M.J. Goeckner, University of Texas at Dallas |
| 4:00pm | PS-ThA7 Experimental Implementation of Robust Multivariable Real-time Feedback Control Design for RIE Plasma Processing System Yang Zhang, B.J. Keville, A. Holohan, S. Daniels, NCPST Dublin City University, Ireland |
| 4:20pm | PS-ThA8 Real Time, Multivariable Control of an SF6/O2/Ar Plasma Bernard Keville, M.M. Turner, Dublin City University, Ireland |
| 4:40pm | PS-ThA9 Maxwell Demon and its Instabilities Chi-Shung Yip, N. Hershkowitz, University of Wisconsin-Madison |
| 5:00pm | PS-ThA10 Reliable Arc Detection and Arc Mitigation in RF Plasma Systems David Coumou, R. Chouiery, MKS, ENI Products |