AVS 58th Annual International Symposium and Exhibition
    Nanomanufacturing Science and Technology Focus Topic Wednesday Sessions
       Session NM+AS+MS-WeM

Invited Paper NM+AS+MS-WeM9
Local Probes Enabling Science and Manufacturing

Wednesday, November 2, 2011, 10:40 am, Room 111

Session: Nanomanufacturing Issues: Metrology and Environmental Concerns
Presenter: Dawn Bonnell, University of Pennsylvania
Correspondent: Click to Email

The last decade has witnessed significant advances in measuring nanoscale phenomena. These advances have enabled scientific discovery and provided a framework to support some nanomanufacturing processes. Nevertheless, both scientific advance and to a greater extent manufacturing are limited by our current capabilities in nanoscale metrology. This talk will highlight some of the exciting advances in probe based metrology, project future developments and outline the challenges that are critical to realizing a robust nanomanufacturing sector. The outcome of a recent global assessment of Nano Metrology will also be summarized.