AVS 58th Annual International Symposium and Exhibition | |
Helium Ion Microscopy Focus Topic | Wednesday Sessions |
Session HI+AS+BI+NS-WeM |
Session: | Nano- and Bio- Imaging with Helium Ion Microscopy |
Presenter: | Bruce Arey, Pacific Northwest National Laboratory |
Authors: | B.W. Arey, Pacific Northwest National Laboratory V. Shutthanandan, Pacific Northwest National Laboratory Y. Xie, Pacific Northwest National Laboratory A. Tolic, Pacific Northwest National Laboratory G. Orr, Pacific Northwest National Laboratory |
Correspondent: | Click to Email |
The Rutherford backscattered ion (RBI) is a helium ions imaging mode, which backscatters helium ions from every element except hydrogen, with a backscatter yield that depends on the atomic number of the target. Energy-sensitive backscatter analysis is being developed, which when combined with RBI image information, support elemental identification at helium ion submicron resolution. This capability will enable distinguishing NPs from cell surface structures with nanometer resolution.