| AVS 57th International Symposium & Exhibition | |
| Applied Surface Science | Tuesday Sessions |
| Session AS-TuP |
| Session: | Applied Surface Science Poster Session |
| Presenter: | P. Streubel, Universität Leipzig, Germany |
| Authors: | R. Hesse, Universität Leipzig, Germany P. Streubel, Universität Leipzig, Germany R. Denecke, Universität Leipzig, Germany |
| Correspondent: | Click to Email |
The accuracy of thickness determination of laterally homogenous films by XPS in the range of few nm may be improved by combining two different methods. The results of the well established angle resolved photoelectron spectroscopy (ARXPS) for determining film thicknesses will be compared with the ones determined using the relative quantification of photoelectron lines at two different kinetic energies (i.e. energy-resolved) and the same emission angle (ERXPS). Only the substrate intensities were used. The advantages and disadvantages of both methods will be shown. The reliability and accuracy of the thickness determination by the two different methods is discussed for suitable model and real systems. The easy handling of the data analysis for estimating film thicknesses using UNIFIT will be demonstrated.