| AVS 56th International Symposium & Exhibition | |
| Plasma Science and Technology | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:00am | PS1-ThM1 Coupled Ion, Photon and Electron Synergies in Plasma-Surface Interactions for Organic Materials D.B. Graves, University of California at Berkeley |
| 8:20am | PS1-ThM2 Control of Photoresist Erosion in SiO2 Plasma Etching in DC Augmented CCP Tools M. Wang, Iowa State University, M.J. Kushner, University of Michigan |
| 8:40am | PS1-ThM3 Invited Paper Ultimate Top-down Processes for Future Nanoscale Devices - Novel Neutral Beam Process and Control of Atomic Layer Chemical Reaction S. Samukawa, Tohoku University, Japan |
| 9:20am | PS1-ThM5 Accurate Control of Ion Bombardment in an Expanding Thermal Plasmas P. Kudlacek, R.F. Rumphorst, A. Illiberi, M.C.M. van de Sanden, Technical University Eindhoven, The Netherlands |
| 9:40am | PS1-ThM6 Plasma Induced Modification of an Organic Photoconductor in an Electrophotographic System K. Nauka, S. Chang, H.-T. Ng, Hewlett-Packard Company |
| 10:40am | PS1-ThM9 Control of Selectivity and Profile for HfO2 Etching in BCl3-Containing Plasmas K. Nakamura, Y. Ueda, H. Kiyokami, H. Tsuda, K. Eriguchi, K. Ono, Kyoto University, Japan |
| 11:00am | PS1-ThM10 Etching Mechanisms of FeCo Magnetic Films by Chemically Reactive Energetic Ion Injections K. Karahashi, T. Ito, Y. Matsumoto, S. Hamaguchi, Osaka University, Japan |
| 11:20am | PS1-ThM11 Characterizing the Effects of Etch-Induced Material Modification on the Crystallization Properties of Nitrogen Doped Ge2Sb2Te5 E.A. Joseph, S. Raoux, J.L. Jordan-Sweet, IBM/Macronix PCRAM Joint Project - IBM T.J. Watson Res. Ctr, D. Miller, H.-Y. Cheng, IBM/Macronix PCRAM Joint Project - IBM Almaden Res. Ctr, A. Schrott, C.-F. Chen, R.K. Dasaka, IBM/Macronix PCRAM Joint Project - IBM T.J. Watson Res. Ctr, R.M. Shelby, IBM/Macronix PCRAM Joint Project - IBM Almaden Res. Ctr, Y. Zhang, IBM/Macronix PCRAM Joint Project - IBM T.J. Watson Res. Ctr, J.S. Washington, M.A. Paesler, G. Lucovsky, North Carolina State Univ. |
| 11:40am | PS1-ThM12 Surface Properties of Plasma Treated Metal Oxides K. Trevino, E.R. Fisher, Colorado State University |